anodic bonding – TechConnect Briefs

Fabrication of Capacitive Micromachined Ultrasonic Transducer Arrays Using Glass Reflow Process and Anodic Bonding

Toan N.V., Hahng S., Song Y., Ono T., Tohoku University, JP

This paper presents a process for the fabrication of vacuum-sealed capacitive micromachined ultrasonic transducer (CMUT) arrays using glass reflow and anodic bonding techniques. The silicon through-wafer interconnects have been investigated by glass reflow process. Then, [...]

Analysis of Anodic Bonding and Packaging Effects in Micro Sensors

Shing T-K, Industrial Technology Research Institute, TW

Anodic bonding is quite popular in making micro-sensors since it can bond sodium-rich glass to silicon or virtually any metals with good adhesion strength in lower temperature. It is well known that this process will [...]