active compensation of motion errors

Active Air Bearing Technology for Compensating Multi-DOF Motion Errors of Ultra-Precision Motion Units

Ro S.-K., Khim G., Park J.K., Korea Institute of Machinery and Materials, KR

In this paper, we introduce rotary and linear motion units with active magnetic preloads and show experimental results for active compensation of motion errors by feedforward method. To compensate motion errors, linear stage and rotary [...]