Contact-free Handling of Metallic Submicron and Nanowires for Microelectronic Packaging Applications
Fiedler S., Zwanzig M., Jäger M.S., Böttcher M., Fraunhofer Institute for Reliability and Microintegration, DE
Individual submicron particles produced by non-lithographic techniques can be attractive for future microelectronic applications. Their touchless manipulation is a necessary prerequisite to use them, since they are too small to be handled via Pick&Place. We [...]