Fabrication and Transistor Demonstration on Si-based Nanomembranes
Yuan H-C, Roberts M.M., Savage D.E., Lagally M.G., Ma Z., Celler G.K., University of Wisconsin-Madison, US
We demonstrate the fabrication of free standing Si, SiGe, and Si/SiGe/Si membranes and the ability to transfer them onto various kinds of host substrates. In addition to the unstrained Si, SiGe membranes, strained Si is [...]