Compact Electromagnetic XY Stage with Nano Scale Resolution and Vibration Resistance
Lee K-I., Kim S-H, Cho J-W, Choi Y.J., Shin J-K, Yoo J.C., Choi Y.J., Korea Electronics Technology Institute, KR
The design, fabrication, and the measurement results of an electromagnetic XY stage are presented. The device has an anti vibration structure and shows a high fill factor of 45% due to its unique structure. Furthermore, [...]