Observation of Soft-Breakdown in Ultra-Thin SiO2 Films under Repetitive Ramped Voltage Stress by Using Conductive Atomic Force Microscopy
The degradation and breakdown characteristics of ultra-thin SiO2 (Tox = 5 nm) were investigated by using conductive AFM (C-AFM). Repetitive ramped voltage stress (RVS) was applied through the C-AFM tip to the oxide with polarity [...]