Surface Nanostructuration: from coatings to MEMS fabrication
Pugin R., Blondiaux N., Popa A.M., Klein M., Montagne F., Scolan E., Hoogerwerf A., Overstolz T., Liley M., Giazzon M., Weder G., Heinzelmann H., Centre Suisse d’Electronique et de microtechnique, CH
The fabrication of surfaces and films with controlled nanometer features is currently an active area of research. The design of complex nanoarchitectures with novel physical properties has potential applications in many existing and emerging fields [...]