Utke I. – TechConnect Briefs

High spatial resolution Hall nano-sensors by tuned direct-write Co/C-FEBID

Gabureac M.S., Bernau L., Boero G., Utke I., EMPA, CH

Gas assisted focused electron beam induced deposition (FEBID) is a direct write technique that allows for the deposition of nanoscale structures inside standard scanning electron microscopes (SEM). Here we show that composition of the nano-deposits [...]

Polarisation stabilisation of telecom lasers by minimally-invasive direct-write focused electron beam induced deposition

Utke I., Jenke M.G., Roeling C., Thiesen P.H., Iakovlev V., Sirbu A., Mereuta A., Caliman A., Kapon E., EMPA, Swiss Federal Laboratories for Materials Science and Technology, CH

The possibility to deposit or remove very small amounts of material for tuning purposes on a fully processed micro/nanodevice at the right place, at will, and without damage to surrounding sensitive areas can be very [...]