A MEMS Vertical Fringe Comb Capacitive Pressure Sensor for Biomedical Application
Shah K., Thumu H., Vibhute V., Singh J., Le H.P., Center of Telecommunication and Microelectronics, AU
This paper presents the design and implementation of a Micro Electromechanical Systems (MEMS) vertical fringe comb capacitive pressure sensor using Coventorware and Cadence SpectraRF Electronic Design Automation (EDA) tools. The pressure sensor is designed to [...]