Capillary filling speed in silicon dioxide nano-channels
Jarlgaard S.E., Mikkelsen M.B.L., Skafte-Pedersen P., Bruus H., Kristensen A., Technical University of Denmark, DK
We present a simple silicon-based fabrication technique for nanocapillaries based on controlled growth of silicon-dioxide, UV lithography, etching with etch-stop, and glass wafer bonding. Our approach improves state-of-the-art with respect to the obtained cross-wafer homogeneity [...]