Sim W. – TechConnect Briefs

Thermal and Load-Deflection FE Analyses of Parylene Diaphragms

Sim W., Kim B., Choi B., Park J-O, Intelligent Microsystem Center, KR

In this study, the finite-element method(FEM) is employed in order to analyze the mechanical behavior of parylene diaphragm. Thermal and load-deflection FE analyses of flat and corrugated parylene diaphragm are performed to find an effect [...]