Silver R.M. – TechConnect Briefs

Nanoparticle size and shape evaluation using the TSOM optical microscopy method

Attota R., Silver R.M., Vladar A., NIST, US

We present a novel optical technique that produces nanometer dimensional measurement sensitivity using a conventional optical microscope, by analyzing through-focus scanning optical microscope (TSOM - pronounced as ‘tee-som’) images obtained at different focus positions. In [...]

Metrology Development for the Nanoelectronics Industry at the National Institute of Standards and Technology

Dagata J.A., Richter C.A., Silver R.M., Vogel E., Martinez de Pinillos J.V., NIST, US

The National Institute of Standards and Technology has provided and continues to provide critical metrology development for the semiconductor manufacturing industry as it moves from the microelectronic era into the nanoelectronic era. This presentation will [...]