Seshia A.A. – TechConnect Briefs

Effects of Etch Holes in Microelectromechanical Resonators

Yan J., Seshia A.A., University of Cambridge, UK

Micromachining processes such as surface machining of polysilicon microstructures or SOI-based processes often require etch holes to be created in the structural layer for purposes of releasing the mechanical structures. The present work examines the [...]

Identification of Anisoelasticity and Nonproportional Damping in MEMS Gyroscopes

Phani A.S., Seshia A.A., University of Cambridge, UK

A novel approach to identify nonproportional damping and structural anisoelasticities in vibratory MEMS gyroscopes is proposed in this paper. The proposed identification method is based on measured vibration data in the form of frequency response [...]

Coupling Of Resonant Modes In Micromechanical Vibratory Rate Gyroscopes

Phani A.S., Seshia A.A., Palaniapan M., Howe R.T., Yasaitis J., University of Cambridge, UK

Analytical models are presented to describe the resonant modal coupling behaviour of z-axis micromechanical vibratory rate gyroscopes fabricated in an integrated polysilicon surface micromachining process. The models are then applied to predict the extent of [...]

Compliant Force Amplifier Mechanisms for Surface Micromachined Resonant Accelerometers

Pedersen C.B.W., Seshia A.A., University of Cambridge, UK

The present work deals with the optimization of a compliant force amplifier mechanism in a surface micromachined resonant accelerometer. Figures of merit including noise floor and scale factor are critically dependent on the gain of [...]

Micromechanical Pierce Oscillator for Resonant Sensing Applications

Seshia A.A., Low W., Bhave S.A., Howe R.T., Montague S., University of California, US

We present the design techniques and experimental characterization of a Pierce oscillator circuit adapted for micromechanical elements with resonant frequencies lying between 100 and 300 kHz. Micromechanical double-ended tuning fork resonators serve as the crystal [...]