Fabrication of 1D nanochannels with thin glass wafers for single molecule studies
Hoang H., Segers-Nolten I., Tas N., de Boer M., Subramaniam V., Elwenspoek M., Mesa+ Institute for Nanotechnology, NL
1D nanochannels are fabricated by direct bonding between the silicon wafer containing the nanochannels, microchannels, access holes and the blank thin glass of 170 µm thickness. The thin glass wafers are used as channel covers [...]