Precision Micro-Optical Elements for Manufacturing of Gas Sensors using IR-Absorption
Quenzer H.-J., Janes J., Stenchly V., Schwarzelbach S., Wagner B., Dudde R., Fraunhofer Inst. Silicon Technology, DE
A new process technology has been developed by Fraunhofer Institute Silicon Technology for manufacturing precise optical components from borosilicate glass by eight inch wafer batch processing. Glass forms are produced by a contact-less glass flow [...]