Schmidt R.C. – TechConnect Briefs

Automated and Integrated Mask Genertion from a CAD Constructed 3D Model

Schiek R.L., Schmidt R.C., Sandia National Laboratories, US

We have developed and implemented a method which when given a three-dimensional object can infer from the object's topology the two-dimensional masks needed to produce that object with surface micromachining. The masks produced by this [...]

Feature Length-Scale Modeling of LPCVD and PECVD MEMS Fabrication Processes

Musson L.C., Ho P., Plimpton S.J., Schmidt R.C., Sandia National Laboratories, US

The surface micromachining processes used to manufacture MEMS devices and integrated circuits transpire at such small length scales and are sufficiently complex that theoretical analysis of them is particularly inviting. Under development at Sandia National [...]

MEMS Fabrication Modeling with ChISELS: A Massively Parallel 3-D Level-Set Based Feature Scale Modeler

Musson L.C., Plimpton S.J., Schmidt R.C., Sandia National Laboratories, US

We are developing ChISELS (Chemically Induced Surface Evolution with Level-Sets), a parallel code to model 3-D material depositions and etches at feature scales on patterned wafers at low pressures. ChISELS is a platform on which [...]