Investigation of Stress in AlN Thin Films for Piezoelectric MEMS
Sah R.E., Kirste L., Baeumler M., Hiesinger P., Cimalla V., Lebedev V., Baumann H., Fraunhofer Institute for Applied Solid State Physics, DE
Wurtzite type AlN thin films have recently become of great interest in microelectromechanical system (MEMS) and nanoelectromechanical system (NEMS) for sensing applications such as chemical and biological sensing, electrometry, and scanning probe techniques. As-grown films [...]