A new method for vertical growth of silicon nanowire in the vapor-liquid-solid (VLS) process
Kim Y.J., Suh D., Lee M.L., Ryu H., Electronics and Telecommunications Research Institute (ETRI), KR
We present a new facile method for vertical growth of the silicon nanowire (Si NW) that obviates the need for SiCl4 in vapor-liquid-solid (VLS) process. The VLS process that involves SiCl4 has two major disadvantages; [...]