Nano-Crystalline Ta2O5 Films Deposited by DC Pulsed Magnetron Sputtering
Ligatchev V., Rusli E., Keng L-B, Khuen L-F, Rumin Y., Zhao J., Nanyang Technological University, SG
Thin Ta2O5 layers (95 - 110 nm), deposited at room temperature using pulsed DC magnetron sputtering (PDCMS) in an argon-oxygen (Ar-O2) gas mixture, are investigated. The Ta2O5 samples were prepared at different Ar/O2 flow ratios [...]