Micromachined Accelerometer Design, Modeling and Validation
Davies B.R., Bateman V.I., Brown F.A., Montague S., Murray J.R., Rey D., Smith J.H., Sandia National Laboratories, US
Micromachining technologies enable the development of low-cosr devices capable of sensing motion in a reliable and accurate manner. The development of various surface micromachined accelerometers and gyroscopes to sense motion is an ongoing activity at [...]