Effects of the Process Parameters on the Carbon Nanotubes Growth by Thermal CVD
Verissimo C., Moshkalyov S.A., Ramos A.C.S., Gonçalves J.L., Alves O.L., Swart J.W., CCS - UNICAMP, BR
Carbon nanotubes growth was performed by thermal chemical vapor deposition using a tubular furnace and methane as carbon feedstock gas. Thin films of nickel were employed as catalysts supported onto a SiO2/Si substrate. The influence [...]