A Novel Pneumatically Driven SU-8 Microvalve for High Speed Gas Chromatographic Applications
Nubile A., Poggi A., Cozzani E., Elmi I., Zampolli S., Messina M., Cardinali G.C., Mancarella F., Belluce M., CNR, IT
Microvalves are basic components of microfluidic systems and MEMS technology has provided an opportunity for microvalves to be packaged onto a board with integrated microfluidic channels. For the successful miniaturization of integrated fluidic devices, it [...]