Wafer-Level High Density Multifunctional Integration (HDMI) for Low-Cost Micro/Nano/Electro-Opto/Bio Heterogeneous Systems
Gutmann R.J., Lu J-Q, McMahon J.J., Persans P.D., Cale T.S., Eisenbraun E.T., Castracane J., Kaloyeros A.E, Rensselaer Polytechnic Institute, US
A technology platform -wafer-scale high density multifunctional integration (HDMI) -is described which offers the potential for low-cost integration of information processing and sensor/actuator technologies for future microelectronic, nanoelectronic, mixed electro-optical and bio-molecular systems. The HDMI [...]