Growth of Nanostructured Diamond, Diamond-Like Carbon, and Carbon Nanotubes in a Low Pressure Inductively Coupled Plasma
A 13.56 MHz low pressure inductively coupled CH4/CO/H2 plasma has been applied to prepare nanocrystalline diamond particles of 200-700 nm diameter. The minimum diameter of the particles was found to be 5 nm. Two-dimensional platelet-like [...]