Structure and Mechanical Properties of Cr(Al)N/Al2O3 Nanocomposite Hard Coatings Fabricated by Differential Pumping Cosputtering
Analytical electron microscopy revealed the structure of Cr(Al)N/Al2O3 nanocomposite coatings prepared on the Si substrate rotated at a speed as high as 12 rpm in a differential pumping cosputtering system(DPCS). The main layer that sputter-deposited [...]