Fabry-Perot Diaphragm Fiber Optic Sensor (DFOS) for Acoustic Detection
Sun Y., Feng G., Georgiou G., Padron I., Niver E., Noe K., Chin K.K., New Jersey Institute of Technology, US
The diaphragm fiber optic sensor (DFOS) solely based on Fabry-Perot has been designed and fabricated with Micro-electric mechanical system(MEMS) technology. The DFOS utilizes a diaphragm as the sensing element to detect static and dynamic pressure [...]