Very Large Scale Integration of MOEMS Mirrors, MEMS Angular Amplifiers and High-voltage, High-density IC Electronics for Photonic Switching
Bryzek J., Nasiri S., Flannery A., Kwon H., Novack M., Marx D., Sigari El, Chen E., Garate J., Transparent Networks, US
The demand for communication bandwidth together with advances in MEMS (micro-electro-mechanical systems) technology has spurred rapid development in the field of MOEMS (micro-optical-electrical mechanical systems). One exciting opportunity is in the area of photonic switching. [...]