Mukherjee T. – Page 3 – TechConnect Briefs

MEMS Component Extraction

Baidya B., Gupta S.K., Mukherjee T., Carnegie Mellon University, US

Surface micromachined structures are composed of atomic elements like anchors, beams and fingers, which can be further grouped into components like springs, comb drives and plates. Automatic recognition of these elements and com-ponents is crucial [...]

Multi-Mode Sensitive Layout Synthesis of Microresonators

Iyer S., Mukherjee T., Fedder G.K., Carnegie Mellon University, US

Microresonator layouts are synthesized such that their preferred mode of oscillation is well-separated from the higher order in-plane and out-of-plane modes. Building on our previous work, we have incorporated models for four out-of-plane modes. All [...]