Modi V. – TechConnect Briefs

Analytical and FEM Simulation Pull-in Study on Deformable Electrostatic Micro Actuators

Cheng J., Zhe J., Wu X., Farmer K.R., Modi V., Frechette L., Columbia University, US

In this paper, we employed an easy general theory [1, 2] over FEM simulation to carry out the pull in analysis of cantilever beam, fixed-fixed beam and circular membrane actuators and compare the results with [...]

Analytical Pull-in Study on Non-Deformable Electrostatic Micro Actuators

Zhe J., Wu X., Cheng J., Wang J., Farmer K.R., Frechette L., Modi V., Columbia University, US

A general theory and method was presented and employed to analyze the static behaviors of non-deformable electrostatic actuator systems with various electrode shapes. This method utilizes capacitance-based generalized equations and provides an easy and time [...]