Subsurface characterization of high dielectric nanostructures in low dielectric polymer matrix using Electric Force Microscopy and Scanning Electron Microscopy
Zhao M., Ming B., Stutzman P., Chen G., Gu X., Park C., Jean Y.C., Nguyen T., National Institute of Standards and Technology, US
Scanning Probe Microscopy (SPM) and Scanning Electron Microscopy (SEM) are two powerful techniques for surface characterization of nanostructures. With the development of nanotechnology, there is a growing need to nondestructively characterize nanostructures at the subsurface [...]