A Piezoresistive MEMS Memory Device Using a Buckled Beam
Yang J.A., Shuvra P.D., Lin J-T., Walsh K., McNamara S., Alphenaar B., University of Texas at Austin, US
Microelectronics and microelectromechanical systems (MEMS) have given rise to a large class of new de- vices, from ultra-miniature sensors for cell phones and automobiles to complex memory devices for computers. Recent research in memory devices [...]