Maninder K. – TechConnect Briefs

Comparison of Electrical performance of Symmetric Toggle Switch with different dielectric layers

Maninder K., Central Electronics Engineering Research Institute, IN

This paper presents the electrical performance comparison of Symmetric Toggle RF MEMS Switch (STS), by incorporating hafnium oxide (HfO2) as a dielectric material instead of silicon dioxide (SiO2). Fig. 1(a) and (b) shows the 3-D [...]

Design of compact, high capacitance ratio MEMS switch for X – Band applications using high-k dielectric materials

Maninder K., CEERI, IN

This paper presents the design optimization of Symmetric Toggle RF MEMS Switch (STS). STS is based on 50 ohm CPW configuration with torsion springs of movable membrane anchored to the ground planes of CPW. The [...]