A Line Force Model to Measure the Strength of Polydimethylsiloxane (PDMS)-to-PDMS Bonding in Blister Tests
Bonding is an important technique in microelectronics and Microelectromechanical Systems (MEMS). Especially, bonding two pieces of polydimethylsiloxane (PDMS) to make micro devices was widely used in micro actuators and BioMEMS. The PDMS bonding, however, lacked [...]