Mid-infrared Silicon Platform for Chip-scale Chemical Sensors
Lin H.-Y.G., Lin P-T, Lin H.-Y.G., Lin P-T, Singh V., Patel N.S., Hu J., Richardson K., Luzinov I., Hensley J., Kimerling L., Murthy Agarwal A., Massachusetts Institute of Technology, US
Mid-Infrared optofluidics based silicon sensor platforms are demonstrated. Silicon is a great candidate for mid-infrared optofluidics for the following reasons: (1) Silicon has a broad transmission window up to 7 um (2) Silicon offers CMOS [...]