Novel Ion Beam Tools for Nanofabrication
Ji Q., Jia L., Jianga X., Jianga X., Jia L., Jianga X., Chena Y., van der Akker B., Leung K.-N., Lawrence Berkeley National Laboratory, US
The drive towards controlling materials properties at nanometer length scales relies on the availability of efficient tools. Ion beams have played a significant role in nanoscience and technology both in material modification (e. g., ion [...]