Prediction Model of Microlens Fabricated by Modified LIGA Process
Kim D.S., Lee S-K, Lee S.S., Yang S.S., Kwon T.H., Lee S-K, Lee S.S., Pohang University of Science and Technology, KR
In this paper, we present a prediction model for microlens formation by means of a deep X-ray lithography followed by a thermal treatment of a PMMA (Polymethyl-methacrylate) sheet. According to this modeling, X-ray irradiation causes [...]