Lee M.J. – TechConnect Briefs

Experiments on removing nano particles on a substrate using a supersonic particle beam

Lee J.W., Lee M.J., Lee J.W., Lee M.J., Yi M-Y, Pohang University of Science and Technology, KR

Cryogenic particle beam can be an effective means of removing nano-sized contaminant particles from a substrate surface. In order to generate a particle beam of high intensity and controlled size and temperature, Argon gas was [...]

Condensation and Evaporation of a Nano-sized Particle Moving in a Fluid Environment

Yi M-Y, Lee J.W., Lee M.J., Lee J.W., Lee M.J., Pohang University of Science and Technology, KR

Condensation and evaporation of a low temperature nano-sized argon particle moving in a gas/vapor environment was analyzed using the molecular dynamics simulation. First evaporation temperature for various heating rates was found and successfully compared with [...]