König E-R – TechConnect Briefs

Analysis of Unstable Behavior Occurring in Electro-Mechanical Microdevices

König E-R, Wachutka G., Münich University of Technology, DE

We analyze the instability which is inherent to electrostatically driven microdevices. Further, we propose a homotopy method to overcome this difficulty during simulation of these devices. Starting from a simplified model, the governing differential equations [...]

Modeling Strategies for Microsystems

Voigt P., Schrag G., König E-R, Wachutka G., Technical University of Münich, DE

A hierarchical approach to microsystem modeling is outlined. On the device level, the operating behavior is analyzed on the basis of continuous field models To deal with the coupling effects typical of microsystems, various coupling [...]