Kim I. – TechConnect Briefs

Evaporation induced property change and hidden cavity formation

Kim I., Texas A&M University-Corpus Christi, US

Innovative optical techniques based on nano-biophotonics such as surface plasmon resonance (SPR) imaging are developed to characterize the transport and optical properties of nanofluids in situ, real-time, and full field manner. Al2O3 nanofluids (47 nm [...]

Simultaneous removal of nano-sized contaminant particles with multi-modal size distribution using hybrid particle beams

Kim I., Lee J.W., POSTECH, KR

The removal of contaminant particles(CPs) as small as 10nm from wafer surface is essential in successful fabrication of nano-scale devices. The supersonic particle beam technique using nano-sized volatile bullet particles(BPs) was extremely effective in removing [...]

Cleaning 10nm ceramic particles by the supersonic particle beam

Kim I., Hwang K., Lee J.W., POSTECH, KR

Cryogenic aerosol beam using micron-sized aerosol particles has long been successfully used to remove contaminant particles down to 50nm, and supersonic particle beam using particles smaller than 100nm lowered the limit of cleaning down to [...]