Mechanical Robustness of FPA in a-Si Microbolometer with Fine Pitch
Kim B.I., Kim H-Y, Kim K-M, Kim T-H., Kim B.I., Kim H-Y, Kim K-M, Kim T-H., Kim B.I., Kim H-Y, Kim K-M, Kim T-H., Jang W.S., Kim B.I., Kim H-Y, Kim K-M, Kim T-H., Kang T.Y., National Nanofab Center, KR
Uncooled microbolometer has the various applications in many commercial and military applications. Among many sensor materials, amorphous Si have been widely used as sensor materials for their good TCR (Temperature Coefficient of Resistance), mechanical strength, [...]