Design and Fabrication of a Metallic MEMS Gripper Using Electro-Thermal V-Shape and Modified U-Shape Actuators
This abstract reports on the design, fabrication, and characterization of a distinctive MEMS gripper electro-thermally driven by the new metallic (electroplated nickel) V-shape actuator (VSA) and the modified U-shape actuators (mUSA). The VSA and the [...]