Kelly R.G. – TechConnect Briefs

Nanomaching of Silicon nanoporous Structures by Colloidal Gold Nanoparticle

Zhu J., Bart-Smith H., Begley M.R., Kelly R.G., Zangari G., Reed M.L., University of Virginia, US

We report an efficient method for fabricating nanoporous structures in crystalline silicon, using colloidal gold nanoparticles in HF/H2O2 etchant. Colloidal gold in HF/H2O2 solutions accelerates the etching rate by two orders of magnitude and simultaneously [...]