Fabrication and Recording of Bit Patterned Media Prepared by Rotary Stage Electron Beam Lithography
Moneck M.T., Lin W., Powell S., Okada T., Fujimori J., Kasuya T., Katsumura M., Iida T., Kuriyama K., Bain J., Zhu J.-G., Carnegie Mellon University, US
Bit patterned media (BPM) is a promising technology for magnetic recording at ultra-high areal densities beyond 1 Tbit/in2. To be viable, bit patterns must be reliably fabricated across 2.5” disks with few defects and sigma [...]