Jorgensen C.R. – TechConnect Briefs

A 2D Visualization Tool for SUMMiT V Designs

Yarberry V.R., Jorgensen C.R., Sandia National Laboratories, US

This paper describes the 2D Process Visualizer, a CAD tool that enables a SUMMiT (Sandia Ultra-Planar Multilevel MEMS Technology) MEMS designer to visualize the results of applying the process sequence to a mask set by [...]

A 3D Geometry Modeler for the SUMMiT V MEMS Designer

Jorgensen C.R., Yarberry V.R., Sandia National Laboratories, US

This paper will describe the SUMMiT V 3D Modeler; a 3D geometric modeler based on Sandia National Laboratories new five-level process for manufacturing microelectromechanical systems (MEMS). The modeler simulates the SUMMiT V process, a baseline [...]