Jeong D-K – TechConnect Briefs

Fabrication of Metal Oxide Coaxial Nanotubes using Atomic Layer Deposition

Jeong D-K, Oh T-K, Shin H-J, Jung W.-G., Lee J-G, Sung M-M, Kim J-Y, Kookmin University, KR

We fabricated of nanotubular structures of TiO2 and ZrO2 using the gas-phase fabrication method atomic layer deposition (ALD) with nanoporous structure of polycarbonate (PC) templates. Contact printed alkylsiloxane monolayers on both sides of PCs were [...]