Realizing Complex Microsystems: A Deterministic Parallel Assembly Approach
Randall J., Hughes G., Geisberger A., Tsui K., Saini R., Ellis M., Skidmore G., Zyvex Corporation, US
The push towards miniaturization has created substantial interest in microelectromechanical systems (MEMS). To date, most of the developments regarding MEMS technology have relied on monolithic fabrication and integration. The monolithic approach has successfully produced various [...]