Hierlemann A. – TechConnect Briefs

Micropatterning Layers by Flame Aerosol Deposition – Annealing

Tricoli A., Graf M., Mayer F., Kühne S., Hierlemann A., Pratsinis S.E., PTL, CH

The development of scalable methods, which effectively bind nanoparticles to surfaces and provide precise patterns, is a key step towards the commercial exploitation of the distinctive properties of nanoparticles. In this context, the direct deposition [...]

Micropatterning Layers by Flame Aerosol Deposition – Annealing

Tricoli A., Graf M., Mayer F., Kühne S., Hierlemann A., Pratsinis S.E., PTL, CH

The development of scalable methods, which effectively bind nanoparticles to surfaces and provide precise patterns, is a key step towards the commercial exploitation of the distinctive properties of nanoparticles. In this context, the direct deposition [...]

Micro Patterning Sensor Layers by Flame Deposition and Annealing

Tricoli A., Graf M., Mayer F., Kühne S., Hierlemann A., Pratsinis S.E., Swiss Federal Institute of Technology (ETH Zürich ), CH

A wafer-level, CMOS-compatible, dry process for in-situ synthesis, deposition and annealing of nanostructured, porous metal-oxide layers for gas sensors is presented. First, lace-like, nanostructured layers of pure or Pt-doped SnO2 featuring high porosity (98%) are [...]