Euler Buckling of Individual SiGe/Si Microtubes
Zhang L., Dong L.X., Bell D.J., Nelson B.J., Schönenberger C., Grützmacher D., Paul Scherrer Institut, CH
Freestanding Si/SiGe microtubes have been fabricated using the roll-up technique of strained bilayer structures. Si/SiGe bilayers of 18 nm thickness have been rolled into tubes of 1.3 μm diameter. Tubes of 60 μm length have [...]