Local Electrode Atom Probes for 3-D Metrology
Kelly T., Gribb T., Olson J., Martens R., Shepard J., Wiener S., Kunicki T., Ulfig R., Lenz D., Strennen E., Oltman E., Bunton J., Strait D., Imago Scientific Instruments Corp., US
Imago Scientific Instruments is developing its Local Electrode Atom Probe (LEAP) microscope for use in semiconductor, data storage, and other nanotechnology industries to provide 3-D atomic-scale metrology. The LEAP microscope achieves true 3-D atomic-scale analysis [...]