Gaddi R. – TechConnect Briefs

RF-MEMS switching LC-tank network for multiband VCO

Gaddi R., Gnudi A., Bellei M., Margesin B., Giacomozzi F., ARCES - University of Bologna, IT

A recently developed RF-MEMS technology based on high resistivity Silicon substrate and suspended gold membrane is proposed for the design of a switching dual frequency LC-tank, for the implementation of a hybrid MEMS-CMOS dual-band voltage [...]

Interdigitated Low-Loss Ohmic RF-MEMS Switches

Gaddi R., Bellei M., Gnudi A., Margesin B., Giacomozzi F., ARCES - University of Bologna, IT

An interdigitated design for MEMS RF-switches is applied to both a shunt and a series ohmic contact configuration. Interdigitated Al-Ti-TiN RF-signal paths and poly actuation electrodes are arranged underneath an electrodeposited gold plate, suspended by [...]